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Antireflective Hydrophobic Si Subwavelength Structures Using Thermally Dewetted Ni/SiO2 Nanomask Patterns

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Abstract:

We report the disordered silicon (Si) subwavelength structures (SWSs), which are fabricated with the use of inductively coupled plasma (ICP) etching in SiCl4 gas using nickel/silicon dioxide (Ni/SiO2) nanopattens as the etch mask, on Si substrates by varying the etching parameters for broadband antireflective and self-cleaning surfaces. For the fabricated Si SWSs, the antireflection characteristics are experimentally investigated and a theoretical analysis is made based on the rigorous coupled-wave analysis method. The desirable dot-like Ni nanoparticles on SiO2/Si substrates are formed by the thermal dewetting process of Ni films at 900 °C. The truncated cone shaped Si SWS with a high average height of 790 ± 23 nm, which is fabricated by ICP etching with 5 sccm SiCl4 at 50 W RF power with additional 200 W ICP power under 10 mTorr process pressure, exhibits a low average reflectance of ∼5% over a wide wavelength range of 450–1050 nm. The water contact angle of 110° is obtained, indicating a hydrophobic surface. The calculated reflectance results are also reasonably consistent with the experimental data.

Keywords: ANTIREFLECTIVE CHARACTERISTICS; DISORDERED SUBWAVELENGTH STRUCTURES; HYDROPHOBIC SURFACE; INDUCTIVELY COUPLED PLASMA ETCHING; NICKEL NANOPARTICLES; THERMAL DEWETTING

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2011.5000

Publication date: November 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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