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Influence of the N2 Partial Pressure on the Characteristics of CrZrN Coatings Synthesized Using a Segment CrZr Target

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In this study, CrZrN films were synthesized by unbalanced magnetron sputtering (UBM) under various N2 partial pressures and their characteristics such as crystalline structure, surface morphology, microstructure and mechanical properties as a function of the N2 partial pressures were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation, wear tests, and corrosion tests. Results revealed that, with increasing the N2 partial pressure from 0.05 to 0.21 Pa, the nitrogen content of the films increased from approximately 40.9 to 53.7 at%, the deposition rate decreased from approximately 100 to 59 nm/min and the surface roughness (Rms value) was increased from approximately 0.57 to 1.79 nm. The Cr37.3–Zr9.0–N53.7 film has the highest hardness, elastic modulus, and plastic deformation resistance of 36 GPa, 380 GPa, and 0.41, respectively. The Cr37.3–Zr9.0–N53.7 film also has the lowest friction coefficient and wear rate of 0.19 and 3.01 (10−6m3/Nm) at room temperature. In addition, the potentiodynamic test results showed the corrosion resistance of the CrZrN films became increased significantly and their corrosion current density (i corr), corrosion potentials (E corr) and corrosion rate decreased with increasing N2 partial pressure.
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Keywords: CORROSION RESISTANCE; CRZRN FILMS; FRICTION COEFFICIENT; N2 PARTIAL PRESSURE; SEGMENT TARGET; SURFACE ROUGHNESS; UNBALANCED MAGNETRON SPUTTERING

Document Type: Research Article

Publication date: 2011-10-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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