Skip to main content

Nano Structured Physical Vapor Deposited Coatings by Means of Picosecond Laser Radiation

Buy Article:

$105.00 plus tax (Refund Policy)

Molding of nano structures by injection molding leads to special requirements for the tools e.g., wear resistance and as low as possible release forces of the molded components. On the other hand it is not allowed to affect the replication precision. Physical vapor deposition is one of the promising technologies for applying coatings with adapted properties like high hardness, low roughness, low Young's modulus and less adhesion to the plastics melt. Although physical vapor deposition technology allows the deposition of films on micro structures without changing the structure significantly, film deposition on nano structures and small micro structures leads to a relevant change in surface topography. For this reason direct structuring of physical vapor deposition coatings might be beneficial. In this paper structuring was done using a picoseconds ultraviolet laser, Lumera Laser "Rapid," with a master oscillator power amplifier system at 355 nm. Two different coatings were deposited by magnetron sputter ion plating physical vapor deposition technology for laser structuring tests ((Cr,Al)N, (Cr,Al,Si)N). After deposition, the coatings were analyzed by common techniques regarding hardness, Young's modulus and morphology. The structures were analyzed by scanning electron microscopy. The results show a high potential for laser structuring of coatings deposited via physical vapor deposition. Linear structures with sizes between 400 nm and 10 μm were realized.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Data/Media
No Metrics


Document Type: Research Article

Publication date: 2011-10-01

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more