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Microstructure Characteristics of ZrO2 Coating Produced by Atmospheric Pressure Chemical Vapor Deposition

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To settle the problem of low growth rate when prepare ZrO2 thermal barrier coating by Metalorganic CVD (MOCVD), a simple method was employed—atmospheric pressure CVD (APCVD). The paper firstly thermodynamic calculated the effect of O/Zr ratio and temperature on phase formation at various H/C ratios for ZrCl4–CO2–H2–Ar system. With temperature increment, the solid phase changes from C+ monoclinic ZrO2 to Monoclinic ZrO2 then to tetragonal ZrO2. With the increase of H/C ratio, the phase zone of C+ monoclinic ZrO2 expands. XRD and Raman spectrum were employed to measure phase structure of ZrO2 coating at different temperature. At 1300 °C, the coating contains a small amount tetragonal ZrO2 phase besides monoclinic phase; at 1100 °C, the coating is composed of monoclinic ZrO2 phase and a little C. The surface SEM images show the small grains evolve to polycrystals which have clear crystal form when raising temperature. The cross-section images show that dense ZrO2 column crystals arrange normal to the substrate.


Document Type: Research Article


Publication date: September 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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