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Texture and Surface Morphology Effects on Tetragonal Phase Stabilization in ZrO2 Films Deposited by Metal-Organic Chemical Vapor Deposition

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Tetragonal zirconia coatings (ZrO2) without doping any trivalent impurities have been deposited by metal-organic chemical vapor deposition (MOCVD) on (1 0 0) Si single crystals, using Zr(thd)4 precursor. The surface and cross-section morphologies were observed with Field-Emission-Gun Scanning Electron Microscopy (FEG-SEM). The crystalline structures were characterized by grazing incident X-ray diffraction (GIXRD). Crystallographic textures of these films were studied for both {0 1 1} t and {1 1 0} t planes by pole figure recording by X-ray diffraction under a 4-circle goniometer. The internal stresses were measured with the use of sin2 ψ method. In order to study the relationship of microstructures and tetragonal phase stabilization in ZrO2 films, annealing experiments were taken at different temperature. The results show that the critical crystallite size for tetragonal to monoclinic phase transformation is different for samples with different initial microstructures. Besides the critical crystallite size and the residual stress, the texture and crystallite morphology of the ZrO2 films are responsible for the stabilization of the metastable tetragonal phase.


Document Type: Research Article


Publication date: September 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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