Skip to main content

SUBLIBOX: A Proprietary Solvent Free Method for Intense Vaporization of Solid Compounds

Buy Article:

$113.00 plus tax (Refund Policy)


Chemical vapour deposition and atomic layer deposition using precursors that are solids at ambient temperature and pressure present challenges due to the often low saturating vapour pressure of these compounds. Additional concerns arise from the difficulty to maintain a reproducible and stable precursor flow rate to the deposition chamber and from the possible particle contamination if suitable safeguards are not built into the precursor delivery line. In the present contribution, SUBLIBOX, a pilot industrial scale sublimator is presented. SUBLIBOX is based on a new sublimation process involving gas-solid fluidization technology. Aluminum acetyl–acetonate [Al(acac)3], a promising precursor for the processing of alumina films despite its low saturated vapour pressure, is used as a model, though technologically interesting system. Mass balance measurements, involving trapping of the sublimed precursor at the exit of the sublimation chamber, reveal that SUBLIBOX ensures (a) stable, (b) efficient, (c) reproducible and (d) long term precursor vapour flow rates. The process is particularly well adapted for delivering vapours to CVD reactors for coatings on glass and stainless steel or for producing optical fibbers preforms by various techniques.


Document Type: Research Article


Publication date: September 1, 2011

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Partial Open Access Content
Partial Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more