This study examined the micro-structural and electrical properties of N+-ion-implanted ZnO nanorods. Nitrogen ions with energies of 10–90 keV and beam fluxes of 1013–1016 ions/cm2 were implanted on vertically-aligned ZnO nanorods.
Energy dispersive X-ray spectroscopy measurements showed that N+ ions were spread uniformly over the nanorods. Extended X-ray absorption fine structure measurements revealed that the implanted N+s had partially substituted for the oxygen sites. Photoluminescence measurements
showed a neutral-donor bound exciton peak at 3.36 eV and a two-electron-satellite peak at 3.33 eV independent of the ion energy and flux. The I–V characteristic curves showed that the current density was not changed by the N+ ion energy and flux much. These results
strongly suggested that the N ions substituted for the oxygen sites were neutral.
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