Superhard Nanocrystalline Titanium Nitride Films Formed by Inductively Coupled Plasma-Assisted Sputtering

$113.00 plus tax (Refund Policy)

Buy Article:

Abstract:

Nano fabrication technology of superhard TiN films with sub-nanometered crystallites was developed using an Inductively coupled plasma (ICP) during deposition. Nanocrystalline TiN coatings were fabricated by ICP assisted sputtering and the properies of the coatings were investigated. The ICP assisted TiN coatings showed a much higher nano-hardness (>43 GPa) compared to coatings produced by the conventional DC sputtering process. The ICP assisited TiN coatings also showed superior properties in dense microstructure and surface roughness compared to the DC sputtered TiN coatings. The superior mechanical properties of ICP assistted TiN coatings were attributed to the fine and dense microstructure and high compressive residual stress.

Keywords: ICP ASSISTED SPUTTERING; INDUCTIVELY COUPLED PLASMA; TIN

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2011.4794

Publication date: August 1, 2011

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • ingentaconnect is not responsible for the content or availability of external websites
Related content

Tools

Favourites

Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more