Parratt-Based and Model-Independent X-ray Reflectivity Fitting Procedure for Nanoscale Thin Film Characterization

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Abstract:

A general-purpose fitting procedure is presented for X-ray reflectivity data. The Parratt formula was used to fit the low-angle region of the reflectivity data and the resulting electron density profile (continuous base EDP or cbEDP) was then divided into a series of electron density slabs of width 1 Å (discrete base EDP or dbEDP), which is then easily incorporated into the Distorted Wave Born Approximation (DWBA). An additional series of density slabs of resolution-limited width are overlapped to the dbEDP, and the density value of the each additional slab is allowed to vary to further fit the data model-independently using DWBA. Because this procedure combines the Parratt formula and the model-independent DWBA fitting, each fitting method can always be employed depending on the type of thin film. Moreover, it provides a way to overcome the difficulties when both fitting methods do not work well for certain types of thin films. Simulations show that this procedure is suitable for nanoscale thin film characterization.

Keywords: MODEL-INDEPENDENT FITTING; PARRATT FORMULA; THIN FILM CHARACTERIZATION; X-RAY REFLECTIVITY

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2011.3689

Publication date: May 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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