Producing Soft Molds of Different Feature Size from a Single Template
Abstract:Molds having physical dimensions different from those on a template, can be obtained from a single template in a predictable way by stretching an elastomeric mold. Stretching results in a reduction of the pitch for line and space patterns. The duty ratio that is the ratio of line width to pitch can also be reduced independently of the change in the pitch. For two dimensional patterns, the feature shape and size can be altered. The ability to produce any number of different molds from one template should provide an easy route to optimize the feature size and shape in optics inexpensively.
Document Type: Research Article
Publication date: May 1, 2011
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