Producing Soft Molds of Different Feature Size from a Single Template

Authors: Bong, Ki Wan; Kim, Tae-Il; Seo, Soonmin

Source: Journal of Nanoscience and Nanotechnology, Volume 11, Number 5, May 2011 , pp. 4581-4585(5)

Publisher: American Scientific Publishers

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Abstract:

Molds having physical dimensions different from those on a template, can be obtained from a single template in a predictable way by stretching an elastomeric mold. Stretching results in a reduction of the pitch for line and space patterns. The duty ratio that is the ratio of line width to pitch can also be reduced independently of the change in the pitch. For two dimensional patterns, the feature shape and size can be altered. The ability to produce any number of different molds from one template should provide an easy route to optimize the feature size and shape in optics inexpensively.

Keywords: ELONGATION; PDMS; POLY(DIMETHYL SILOXANE); SINGLE TEMPLATE; SOFT MOLD; STRETCHING

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2011.3621

Publication date: May 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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