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Annealing Effects on Capacitance–Voltage Characteristics of a-Si/SiNx Multilayer Prepared Using Hot-Wire Chemical Vapour Deposition

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Abstract:

Post-deposition annealing of a-Si/SiNx multilayer films at different temperature shows varying shift in high frequency (1 MHz) capacitance–voltage (HFCV) characteristics. Various a-Si/SiNx multilayer films were deposited using hot wire chemical vapor deposition (HWCVD) and annealed in the temperature range of 800 to 900 °C to precipitate Si quantum dots (Si-QD) in a-Si layers. HFCV measurements of the as-deposited and annealed films in metal-insulator-semiconductor (MIS) structures show hysterisis in CV curves. The hysteresis in the as-deposited films and annealed films is attributed to charge trapping in Si-dangling bonds in a-Si layer and in Si-QD respectively. The charge trapping density in Si-QD increases with temperature while the interface defects density (Dit) remains constant.

Keywords: A-SI/SINX MULTILAYER; HFCV; HWCVD; MIS STRUCTURE; SI QUANTUM DOTS

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2011.3618

Publication date: 2011-04-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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