Application of Scanning Probe Lithography to Graphite Patterning

Authors: Yong, Hyeondeuk; Lee, Hyunsoo; Kim, K. B.; Lee, N. S.; Seo, Yongho

Source: Journal of Nanoscience and Nanotechnology, Volume 11, Number 2, February 2011 , pp. 1397-1400(4)

Publisher: American Scientific Publishers

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We applied the scanning probe lithographic technique to a graphite patterning in air and analyzed the patterned sample with the lateral force microscopy and Raman spectroscopy. The local electric field generated from a tip caused either etching or oxidization depending on the electric field intensity in air. We have found that the frictional force between the tip and local oxidized graphite surface was increased remarkably from lateral force analysis. Also, it was found that the graphene layer was peeled from the graphite surface in the etching process, which could be a potential tool as a top–down nano-fabrication process for the graphene nano device without contamination.
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