Magnetic anisotropy properties of amorphous ferromagnetic CoSiB/Pt multilayers with perpendicular magnetic anisotropy (PMA, Ku) were systematically investigated as a function of CoSiB layer thickness (tcoSiB) and Pt layer thickness (tPt). In two series of [CoSiB tcoSiB/Pt tPt]5 multilayers, the perpendicular coercivity (Hc) increased to reach a maximum and then decreased with further increase in both tcoSiB and tPt, due to intermixing of CoSiB/Pt interfaces. Particularly, using the amorphous soft magnetic CoSiB, the coercivity became very sensitive to the CoSiB thickness. These multilayer films exhibited a high Ku of 2 × 106 erg/cc and a high Hc of 360 Oe with marked squareness. It was found that even after annealing at 350 °C, the CoSiB/Pt multilayers had a high PMA and their Hc increased.
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