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Nitrogen-Doped ZnO Thin Films Grown on Glass Substrates by Atomic Layer Deposition Using NH3 as a Doping Source

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Abstract:

Nitrogen-doped ZnO (ZnO:N) films were successfully grown on glass substrates by atomic layer deposition (ALD). NH3 was used as a doping source, and the substrate temperature was relatively low (90∼210 °C). The main focus of the study was to report on the effect of the temperature on the electrical properties (e.g., carrier concentration, mobility, etc.) of the grown ZnO:N films. At all temperatures, the carrier was found to be n-type, and its electron concentration did not show much variation within the values between 3 × 1016 and 6 × 1016 cm−3; the mobility increased with the temperature (1 cm2/Vs at 110 °C, 5 cm2/Vs at 190 °C); and the resistivity decreased with the temperature (203 Ωcm at 110 °C, 21 Ωcm at 190 °C). The electrical properties are discussed in relation with the nitrogen concentration, crystallinity, crystal orientation, grain size, and surface morphology. The nitrogen concentration in the ZnO:N films was constant at all temperatures (∼2.5 atomic percent); the crystallinity and crystal orientation improved with the temperature; and the mean grain size increased with the temperature (13.2 nm at 110 °C, 35.3 nm at 190 °C). The results for the ZnO:N films were also compared with the results for the undoped ZnO films.

Keywords: ATOMIC LAYER DEPOSITION; CRYSTALLINITY; ELECTRICAL PROPERTY; GRAIN SIZE; NITROGEN-DOPED ZNO; SURFACE MORPHOLOGY; ZNO

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2011.3254

Publication date: 2011-01-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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