Transduction Dependent Optimization of Electromechanical Parameters for Electrostatically Actuated MEMS/NEMS Resonators
This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane.
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Document Type: Research Article
Publication date: 2010-11-01
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