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Transduction Dependent Optimization of Electromechanical Parameters for Electrostatically Actuated MEMS/NEMS Resonators

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Abstract:

This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane.

Keywords: ELECTROSTATIC ACTUATION; RESONATORS; TRANSDUCTION DEPENDENT OPTIMIZATION

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2010.2801

Publication date: November 1, 2010

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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