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Surface Acoustic Wave Sensors of Delay Lines Based on MEMS

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A high frequency Surface Acoustic Wave (SAW) filter which is the key point of the SAW sensor is made by MEMS technology. The SAW filter used for sensors needs to have the factors of high frequency, low loss and high quality factor. In order to satisfy the performance of the factors, the SAW delay lines of Electrode Wave Control Single Phase Unidirectional Transducer (EWC/SPUDT) are used in the filter. This transducer can be considered as the networks of connection of some units of IDTs and the loss of device can be effectively reduced. Based on the Coupling of Modes (COM) theory and equivalent circuit modal, the mixed matrix (P matrix) of the transducers can be deduced, and further, the response of the delay lines can be obtained. According to the calculated results, a mask layout is made. Then the SAW delay line is completed and found to agree with the theoretical simulation. Its center frequency is 503 MHz and insertion loss is low enough for use of sensors.


Document Type: Research Article


Publication date: 2010-11-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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