Design of Low Cost Gas Sensor Based on SrTiO₃ and BaTiO₃ Films

Authors: Hodak, Satreerat K.; Supasai, Thidarat; Wisitsoraat, Anurat; Hodak, Jose H.

Source: Journal of Nanoscience and Nanotechnology, Volume 10, Number 11, November 2010 , pp. 7236-7238(3)

Publisher: American Scientific Publishers

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Abstract:

We have prepared SrTiO₃/BaTiO₃ multilayer film on alumina substrates by a sol-gel technique and investigated their response for sensing ethanol vapor. The surface morphology of the films were characterized by atomic force microscope (AFM) showing that the grain size of the films increase up to 40 nm as the annealing temperature increased to 1000 °C. The ethanol sensors based on SrTiO₃/BaTiO₃ thin films were fabricated by applying interdigitated gold electrodes by sputtering technique. The ethanol sensing characteristics of SrTiO₃/BaTiO₃ thin films were quantified by the change in resistance of the sensors when they were exposed to ethanol. The optimum operating tempearature of these sensors was found to be 350 °C. In addition, the film annealed at 1000 °C exhibited p-type gas sensing behavior with the best sensitivity of 30-100 for low ethanol concentration in the range of 100-1000 ppm.

Keywords: SRTIO3/BATIO3; GAS SENSOR; SOL-GEL METHOD

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jnn.2010.2800

Publication date: 2010-11-01

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