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Controllable Fabrication of Super-Resolution Nanocrater Arrays by Laser Direct Writing

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Abstract:

A super-resolution fabrication technique for highly-ordered nanocrater arrays is reported based on laser direct writing method. Nanocraters with diameters up to 40 nm, which is much smaller than the diffraction limit of laser system, are fabricated on titanium films using a 532 nm laser. The diameters of the craters are tunable from 350 nm to 40 nm, with a rigorous linear relationship versus the writing laser powers and an approximate linear relationship versus pulse widths. Laser ablation and oxidation are involved in formation mechanism and Gaussian distribution of laser energy density is proposed to play a key role of super-resolution structures.

Keywords: DIFFRACTION LIMIT; LASER DIRECT WRITING; NANOCRATER; SUPER RESOLUTION; TITANIUM FILM

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2010.2861

Publication date: November 1, 2010

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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