Micropatterning of Polymer-Embedded Metal Nanoparticles by an Ion Beam Contact Lithography
Abstract:A convenient and effective method to pattern polymer-embedded metal nanoparticles by ion irradiation has been developed. The thin Pluronic films containing silver nitrate as a precursor of silver nanoparticles were irradiated through a pattern mask with accelerated proton (H+) ions. It was found from the UV-Vis measurement that the formation of silver nanoparticles in the Pluronic matrix was dependant on the amount of silver nitrate. The 50 m line (pitch 150 m) patterns of the Pluronic containing silver nanoparticles were obtained with the thin film irradiated to 1 × 1016 ions/cm2. The heat treatment effect on the morphology of the patterns was investigated by using a scanning electron microscope with an energy dispersive X-ray spectrometer. The results confirmed that the silver nanoparticles were successfully embedded in the Pluronic patterns and the patterns were changed into large silver particles by a heat treatment above 350 °C.
Document Type: Research Article
Publication date: October 1, 2010
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