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Electron Beam Annealing of Fe+ Implanted Si Nanostructures

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Abstract:

Silicon nanostructures (nanowhiskers) have been formed at surface densities ∼109 cm−2 by electron beam annealing (EBA) prior to the implantation of 7 keV Fe+ ions to fluences from 1 × 1013–4 × 1015 Fe+ cm−2. A second EBA step is then applied to relieve implantation-induced stresses. RBS analysis shows that the implanted Fe remains close to the surface. AFM characterisations of the implanted nanowhiskers before and after the final EBA step are summarised in graphs of height versus surface density. In a striking result it is shown that the nanowhiskers not only survive processing but also grow significantly. For example, at the highest fluence of 4 × 1015 Fe+ cm−2, the average height more than doubles: the increases are from 5.0 nm to 6.5 nm under implantation and from 6.5 nm to 11.8 nm under EBA. In addition there is a significant increase in surface density from an initial value of 1.6 × 109 cm−2 to 4.3 × 109 cm−2. These results highlight the feasibility of doping Si surface nanostructures with magnetic ions to fabricate Si devices for spin-dependent enhanced field emission.

Keywords: ELECTRON BEAM ANNEALING; FE; SILICON NANOWHISKERS

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2010.2650

Publication date: October 1, 2010

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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