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Nano-Fin Based Mercury-Sensor for Environmental Surveillance

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Abstract:

This Nano-Fin-Sensor bases on a lithography-independent technology-process, enabling research on Nano-Sensors without cost-intensive technology-equipment. Background for the sensor described within this paper is the high pollution with mercury of the environment and the lack of cheap, easy to use and portable sensors. The lithography-independent process is based on a "deposition and etch-back" technique defining Nano-Fins. Active sensor-material is a gold-layer, deposited on the fin, increasing resistance being exposed to mercury-vapor due to the process of amalgamation. Regeneration is done by heating-up the gold-layer using the poly-silicon fin as resistance-heating-device driving out the adsorbed mercury. To increase the measurement-accuracy, the sensor is made up of four Nano-Fin-Sensors, connected as Wheatstone-bridge. Two sensors have to be passivated by a mercury diffusion barrier, here a silicon–nitride-layer.

Keywords: AMALGAMATION; LITHOGRAPHY INDEPENDENT; MERCURY-SENSOR; NANO-FIN; NANOSTRUCTURE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2010.2605

Publication date: September 1, 2010

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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