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High Sensitive NO2 Gas Sensor with Low Power Consumption Using Selectively Grown ZnO Nanorods

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Abstract:

The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol–gel growth method on selective area and gas response characteristics to NO2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.

Keywords: MICRO HEATER; SEMICONDUCTING GAS SENSOR; SOL-GEL GROWTH METHOD; ZNO NANORODS

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2010.2261

Publication date: 2010-05-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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