If you are experiencing problems downloading PDF or HTML fulltext, our helpdesk recommend clearing your browser cache and trying again. If you need help in clearing your cache, please click here . Still need help? Email help@ingentaconnect.com

Nearly Gaussian Dependence Between Near-Infrared Photoluminescence and O/Si Composition Ratio of Si-Rich SiOx Film with Buried Si Nanocrystals

$113.00 plus tax (Refund Policy)

Buy Article:

Abstract:

O/Si composition ratio optimized near-infrared (NIR) photoluminescence (PL) from Si nanocrystal (nc-Si) precipitated in Si-rich SiOx grown by Ar-diluted SiH4 and N2O is demonstrated. By detuning N2O fluence and N2O/SiH4 ratio to adjust the O/Si composition ratio of SiOx from 1.38 to 0.88, a nonlinearly Gaussian-like dependency of PL versus O/Si ratio with its maximum at O/Si of 1.24 is obtained. Maximized Si atomic density of 44.64 atom.% and nc-Si related PL of 25 count/nm is observed from SiOx with O/Si = 1.24 grown at N2O fluence of 50 sccm and N2 O/SiH4 flowing ratio as low as 5.5. The FTIR analysis clearly indicates that the strong absorption bands at 870 and 2250 cm−1 contributed by Si–H bonds suggests the hydrogen-passivated nc-Si could efficiently preserve the NIR PL response. Further reduction on O/Si composition ratio inevitably transfers the phase of host matrix from Si2O3 to SiO, which exhausts residual Si atoms and greatly decreases nc-Si density to degrade the PL response.
More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • ingentaconnect is not responsible for the content or availability of external websites
Related content

Tools

Favourites

Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more