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Microresonators in CMOS Compatible Substrate

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We report our recent progress in designing and developing traveling-wave microresonators on CMOS compatible substrate, with a focus on ultra-compact Si-based microring and microdisk resonators in the visible and near infrared wavelengths with ultra-high Q and small mode volume, suitable for strong light-matter interaction. The performance of these resonators is discussed, and the design and fabrication challenges and solutions to achieve efficient coupling from the bus-waveguide to the resonator is mentioned. Coupled-resonator architectures for the design of filters are analyzed and theoretical and experimental results for the flat-band filters with wide bandwidth and large free spectral range are presented. Furthermore, by using a detailed thermal model we demonstrate optimized microresonator structures on semiconductor substrates with improved thermal conductivity that can sustain a high circulating optical intensity at the resonance wavelength, which is particularly useful for nonlinear optics and optical signal processing applications. Finally, we address some of the applications and future prospects of such microresonators in CMOS-compatible substrate technology, including portable multi-purpose bio/chemical sensing systems, reconfigurable optical signal processing modules and chip-scale optical amplifiers and lasers.


Document Type: Review Article


Publication date: March 1, 2010

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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