Formation of Interconnects with Carbon Nanotubes by Nano-Patterning and Acoustics-Assisted Alignment
In this work, the feasibility of self-assembling double-walled carbon nanotubes (DWCNTs) to form nano-sized interconnects over pre-fabricated gold electrodes using a combination of nano-patterning, surface functionalization and acoustics-assisted alignment of the DWCNTs was studied. Self-assembly and concurrent alignment of DWCNTs over the gold electrodes on selectively functionalized surfaces within nano-patterns took place in a fluid medium with the potential scalability for wafer-sized mass production. The adverse impacts of curvature and misalignment of DWCNTs on the chance of their attachment to the target zones were analyzed. Microscopic observations and electrical I–V curve measurements verified that DWCNT interconnects were indeed formed. The results indicated that the fabrication of self-assembled interconnects through the combined usage of nano-patterning, surface functionalization and DWCNT alignment is feasible and is in the right direction towards the fabrication of interconnects for future carbon nanotube-based devices and circuits.
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Document Type: Research Article
Publication date: 2009-11-01
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