Selective Growth of Metallic Nanostructures on Surfaces Patterned by AFM Local Anodic Oxidation

Authors: Bartošík, Miroslav; Kolíbal, Miroslav; Čechal, Jan; Mach, Jindřich; Šikola, Tomáš

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 10, October 2009 , pp. 5887-5890(4)

Publisher: American Scientific Publishers

Buy & download fulltext article:

OR

Price: $113.00 plus tax (Refund Policy)

Abstract:

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Keywords: COBALT ISLANDS; GALLIUM DROPLETS; LOCAL ANODIC OXIDATION; METALLIC NANOSTRUCTURES; PATTERNING; SELECTIVE GROWTH

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2009.1251

Publication date: October 1, 2009

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • ingentaconnect is not responsible for the content or availability of external websites
Related content

Tools

Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content

Text size:

A | A | A | A
Share this item with others: These icons link to social bookmarking sites where readers can share and discover new web pages. print icon Print this page