Surface Analysis in Nanotechnology

Author: Oechsner, Hans

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 7, July 2009 , pp. 3999-4007(9)

Publisher: American Scientific Publishers

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Abstract:

The physical and instrumental background of commercially available surface analytical techniques based on electron spectroscopy and mass spectrometry are briefly described. Their application to the characterization of nanoscopic structures and material properties is elucidated by a number of practical and technologically important examples. Because of its extremely high depth resolution Secondary Neutral Mass Spectrometry as a more recent technique is particularly considered as well as the identification of solid phases in nanoscaled thin film structures.

Keywords: ELECTRON AND MASS SPECTROMETRY AT SOLID SURFACES; COMPOSITIONAL AND CHEMICAL PHASE ANALYSIS IN NANOS

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jnn.2009.M02

Publication date: 2009-07-01

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Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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