Fabrication of Al Microspheres by Utilizing Electromigration
Abstract:Aluminum microspheres with diameters of 4–7 m have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific range of the temperature at the anode end of Al line.
Document Type: Research Article
Publication date: March 1, 2009
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