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Fabrication of Al Microspheres by Utilizing Electromigration

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Abstract:

Aluminum microspheres with diameters of 4–7 m have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific range of the temperature at the anode end of Al line.

Keywords: ALUMINUM; ELECTROMIGRATION; MICROSPHERE; PASSIVATION LAYER; SURFACE TENSION

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2009.444

Publication date: March 1, 2009

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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