Soft Magnetic Properties of Sequential Deposited Co40Fe40B20/SiO2 Multilayer Nanogranular Films for High Frequency Applications
Multilayer nanogranular films with good soft magnetic properties and high resistivity desired for high frequency applications have been developed in our work. They were prepared by many sequential depositions of thin layers of Co40Fe40B20 and SiO2. After vacuum annealing at 250 °C under a uniform in-plane magnetic field of 100 kA/m for 2 hrs, the [Co40Fe40B20 (1.2 nm)/SiO2 (0.8 nm)]30 multilayer nanogranular films have the hard axis coercivity of 210 A/m, saturation magnetization of 1.05 T, resistivity of 2.06 × 103 μΩ·cm. Moreover, they show an in-plane uniaxial anisotropy of 2.78 kA/m.
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Document Type: Research Article
Publication date: 2009-02-01
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