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Influences of Geometrical Factors on Quantitative Surface Roughness Evaluations by Atomic Force Microscopy

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Abstract:

Influences of tip-convolution-induced artifacts on amplitude roughness measurements by atomic force microscopy under different surface geometrical parameters are analyzed. The concerned surface parameters are mainly standard deviation, correlation length and height distribution. The dependences of measured root-mean-square roughness on the main geometrical properties of both tip and surface are investigated by numerical simulation. It is found conditions for precise roughness measurements predicted through numerical simulations are in reasonable agreement with those obtained by simple analytical approximations. Measurements by atomic force microscopy tend to provide more accurate amplitude roughness values on rough surface with positive skewness.

Keywords: ATOMIC FORCE MICROSCOPY; ROUGH SURFACE; SURFACE METROLOGY

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2009.C048

Publication date: 2009-02-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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