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Quantitative Measurement of Cantilever Spring Constant Using Heterodyne Interferometer

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Using thermal fluctuation induced oscillation, spring constant of different types of reference cantilevers have been measured by heterodyne laser interferometer with traceable displacement at a resolution of 2.6 × 10−15 m/(Hz)1/2. This method provides precise measurements of the scanning probe cantilevers with spring constants ranging from mN/m to kN/m. The accuracy of the spring constant was verified by geometric calculation of the reference levers and measurement by electrostatic force balance. Factors that affect the accuracy impact of thermal tune background have been thoroughly investigated.
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Keywords: ATOMIC FORCE MICROSCOPE; HETERODYNE INTERFEROMETER; MICROFABRICATED CANTILEVERS; POWER SPECTRAL DENSITY; SPRING CONSTANT; THERMAL TUNE

Document Type: Research Article

Publication date: 2009-02-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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