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Traceable Nano Geometric Structure Measurement and International Comparison

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Abstract:

The accuracy of geometric structure plays a key role to guarantee high quality of the nano function device and electronic device. In June 1998, the Consultative Committee for Length (CCL) of International Committee for Weights and Measures decided to carry out international comparisons of five different types of artifacts: Step height standards, 1D-gratings, line scales, 2D-gratings and line width standards. The paper described the activity of NIM in the international comparison measurement of first three items, include the characters of artifacts, the working principle of instruments, the measuring procedures, the calculation methods, the comparison results and the measurement uncertainty.

Keywords: 1D-GRATINGS; ATOMIC FORCE MICROSCOPE; INTERNATIONAL COMPARISON; LINE SCALES; NANOMETROLOGY; OPTICAL DIFFRACTION; OPTICAL-ELECTRONIC COMPARATOR; STEP HEIGHT STANDARDS

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2009.C005

Publication date: February 1, 2009

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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