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Fabrication of Imprint Stamp by Using Nanosphere Lithography and Its Utilization to Photoluminescence Enhancement

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Abstract:

Nanosphere lithography is proposed as a new technique for the fabrication of nanoscale pillars on p-GaN layer. This technique is an easy and simple process using a self-assembled monolayer of spheres, which act as etching masks to form pillars on a Si3N4 substrate, that could be utilized as a stamp for UV-based imprint lithography. We can apply the UV-based imprint technique in the field of solid-state lighting in order to extract more lights to out-world by texturing the outer surface of the light emitting diodes (LED) structure. Photoluminescence intensity from the pillar patterned GaN layer was higher than that from the unpatterned GaN layer by 2.5 times.

Keywords: LIGHT EMITTING DIODE; NANO IMPRINT LITHOGRAPHY; NANO PATTERN; NANO SPHERE LITHOGRAPHY

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2008.1076

Publication date: October 1, 2008

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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