Skip to main content

Effect of Needle-Like Silicon Nanosurface on the Charge Storage Characteristics of Silicon Nanocrystals Embedded within Silicon Nitride Matrix

Buy Article:

$113.00 plus tax (Refund Policy)


In this work, a metal-insulator-silicon (MIS) structure with a silicon nitride (SiNx) film, in which silicon nanocrystals (Si-NCs) are embedded as a gate insulator layer, was fabricated on needle-like silicon nanosurfaces. The MIS structure with Si-NCs embedded within the SiNx on the needle-like silicon nanosurface can be used to fabricate nonvolatile memory (NVM) devices with increased charge storage capacities compared to planar structures. In this study, as part of a strategy to overcome the technological and physical constraints involved in scaling down of NVM devices, the charge storage effects associated with the electronic properties of the MIS structure with a silicon substrate having a needle-like nanostructure were evaluated. For fabrication of the needle-like silicon nanosurfaces, polystyrene-block-polymethyl methacrylate (PS-b-PMMA) block copolymer composed of polystyrene (PS) and polymethyl methacrylate (PMMA) was used. The hysteresis width of the capacitance–voltage (CV) characteristics of the MIS structures embedded with Si-NCs on the silicon substrates of the needle-like nanostructure was greater than that of the MIS structure embedded with Si-NCs fabricated on a planar structure. The interface trap density between the SiNx and uniform needle-like silicon nanosurface was also lower than that of the MIS structure fabricated on a planar structure. Therefore, NVM devices with increased charge storage capacity compared to those fabricated on a planar structure can be realized with a needle-like silicon nanosurface.


Document Type: Research Article


Publication date: October 1, 2008

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Partial Open Access Content
Partial Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more