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Microfabricated In-Channel Structured Polydimethylsiloxane Microfluidic System for a Lab-on-a-Chip

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Abstract:

In this paper, the fabrication of microfluidic system integrated with micropump and microvalve on the same substrate and its high performance are described. The microfabricated microfluidic system has been optimized for application in capillary electrophoresis–electrochemical detector (CE-ECD), polymerase chain reaction (PCR) and microcantilever. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and indium tin oxide heater. The pumping rates of the proposed micropump are measured as functions of the frequency and the duty-ratio of applied voltage. The performances of the microvalves are characterized under the on/off alternation with the applied power of the indium tin oxide (ITO) heater. The flow rate gradually decreases as the applied heater power increase. The optimized membrane thickness for microfluidic system is 350 m. At this condition, the power of the cut-off flow in microvalve is 400 mW and the 70 nl/min of maximum pumping rate is observed at a duty ratio of 4% and a frequency of 4 Hz for the applied pulse power.

Keywords: ITO (INDIUM TIN OXIDE); MICROFLUIDIC; MICROPUMP; MICROVALVE; PDMS (POLYDIMETHYLSILOXANE)

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2008.IC83

Publication date: 2008-09-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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