Synthesis and Properties of Nanocrystalline Copper Indium Oxide Thin Films Deposited by Rf Magnetron Sputtering

Authors: Singh, Mandeep; Singh, V.N.; Mehta, B.R.

Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 8, August 2008 , pp. 3889-3894(6)

Publisher: American Scientific Publishers

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Abstract:

Nanocrystalline copper indium oxide (CuInO₂) thin films with particle size ranging from 25 nm to 71nm have been synthesized from a composite target using reactive Rf magnetron sputtering technique. X-ray photoelectron spectroscopy (XPS) combined with glancing angle X-ray diffraction (GAXRD) analysis confirmed the presence of delafossite CuInO₂ phase in these films. The optical absorption studies show the presence of two direct band gaps at 3.3 and 4.3 eV, respectively. The resistance versus temperature measurements show thermally activated hopping with activation energy of 0.84 eV to be the conduction mechanism.

Keywords: COPPER INDIUM OXIDE; NANOCRYSTALLINE THIN FILMS; MAGNETRON SPUTTERING; XPS; XRD

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jnn.2008.178

Publication date: 2008-08-01

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