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AFM Anodization Lithography on Transparent Conductive Substrates

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Abstract:

In the present study, AFM anodization lithography was carried out on transparent conductive oxide substrates for the first time. ITO glasses were utilized as the transparent substrates. The surface of the ITO glass substrate was organically modified using the SAM (self-assembled monolayer) method. The wettability of the surfaces was controlled by changing the organic molecule used in the SAM method. An arbitrary nanopattern was fabricated using AFM anodization lithography on the organically modified ITO glass surface. Hydrophilic-hydrophobic nanopatterns on transparent substrates are potentially useful for optical observations of various substances adsorbed on nanostructures.

Keywords: AFM; ANODIZATION; ITO; LITHOGRAPHY; SAM; SELF-ASSEMBLED MONOLAYER; SPM

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2008.191

Publication date: August 1, 2008

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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