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Direct Alpha Ta Formation on TaN by Resputtering for Low Resistive Diffusion Barriers

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Abstract:

The Ta/TaN bilayer exhibits the best performance in the Cu metal multilevel interconnects, because it provides good coherence between Cu and dielectric layer. In the Ta/TaN bilayer, Ta has two phases: alpha-phase of body center cubic is preferred due to its lower resistivity (15–60 Ω-cm), whereas beta-phase of tetragonal should be avoided due to high resistive (∼150–250 Ω-cm). However, beta Ta most commonly forms on fcc TaN. Here we provide a simple scheme to bypass this high resistive phase by resputtering TaN prior to Ta deposition. We found that, with surface treatment by argon ion bombardment for enough time, alpha Ta phase can be directly formed, which is supported both by X-ray diffraction and resistivity measurement. Depth profiles of all elements from Auger electron spectroscopy reveals that the surface treatment induces a nitrogen deficient surface layer due to different sputtering yield, which causes phase changes from fcc TaN to hcp Ta2N followed by bcc Ta(N) and provide a favorable lattice constant for Ta alpha-phase formation.

Keywords: DIFFUSION BARRIER; ION BOMBARD; SPUTTERING; TANTALUM; TANTALUM NITRIDE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2008.585

Publication date: May 1, 2008

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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