Piezoelectrics in Micro and Nanosystems: Solutions for a Wide Range of Applications
Author: Muralt, Paul
Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 5, May 2008 , pp. 2560-2567(8)
Publisher: American Scientific Publishers
Abstract:Piezoelectric thin films have interesting prospects in a number of applications for which miniaturization is a driving force. Miniaturization means higher frequency, or higher resolution, or increased functionality. This paper gives a short review on piezoelectric thin films, their deposition processes, integration, properties and applications in microsystems (MEMS), concentrating on the most frequently investigated piezoelectric thin film materials.
Document Type: Research article
Publication date: 2008-05-01
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