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Electron Beam Nanoprocessing of a Carbon Nanotube Film Using a Variable Pressure Scanning Electron Microscope

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Abstract:

We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.

Keywords: CARBON NANOTUBE; ELECTRON BEAM; ENVIRONMENTAL SEM; NANOPROCESSING; VARIABLE-PRESSURE SEM

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2007.420

Publication date: 2007-07-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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