MEMS-Based Probe Recording Technology
This paper reviews the recent developments in the area of MEMS-based probe recording technology. Various state-of-the-art scanning probe microscope (SPM) based techniques are briefly introduced, followed by the description of system approaches of MEMS-based probe recording technology
and the basic MEMS-based actuation mechanism. Subsequently, current research status in developing MEMS-based probe recording technology with emphasis on storage architecture, MEMS access systems, probe recording mechanisms, and media for terabit per square inch recording density, is reviewed.
Lastly, potential research topics and prospects for MEMS-based probe recording technology development are discussed.
Keywords: ACCESS SYSTEM; INFORMATION STORAGE; MEMS; PROBE RECORDING MEDIA; SCANNING PROBE MICROSCOPY
Document Type: Review Article
Publication date: 01 January 2007
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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