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A Method for the Fabrication of Sculptured Thin Films of Periodic Arrays of Standing Nanorods

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A simple method for the fabrication of sculptured thin films (STFs) of periodic arrays of high-aspect-ratio (20:1) standing nanorods on silicon substrates is described. It is based on oblique evaporation onto periodically arranged arrays of "mini-rod" topography using a rotating sample stage. Recently, it has been shown that these nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for technological applications.
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Keywords: DRY PROCESS; E-BEAM DEPOSITION; SCULPTURED THIN FILMS; STANDING NANORODS

Document Type: Research Article

Publication date: 01 December 2006

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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