Skip to main content

A Method for the Fabrication of Sculptured Thin Films of Periodic Arrays of Standing Nanorods

Buy Article:

$113.00 plus tax (Refund Policy)

Abstract:

A simple method for the fabrication of sculptured thin films (STFs) of periodic arrays of high-aspect-ratio (20:1) standing nanorods on silicon substrates is described. It is based on oblique evaporation onto periodically arranged arrays of "mini-rod" topography using a rotating sample stage. Recently, it has been shown that these nanostructures can be prepared on relatively large areas and at low cost, making the method suitable for technological applications.

Keywords: DRY PROCESS; E-BEAM DEPOSITION; SCULPTURED THIN FILMS; STANDING NANORODS

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2006.616

Publication date: 2006-12-01

More about this publication?
  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
X
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more