We report the suspension of individual multi-walled Carbon nanotube (MWNT) from the bottom substrate using deep trench electrodes that were fabricated using optical lithography. During drying of the solution in dielectrophoretic assembly, the capillary force pulls the MWNT toward the bottom substrate, and it then remains as a deformed structure adhering to the bottom substrate after the solution has dried out. Small-diameter MWNTs cannot be suspended using thin electrodes with large gaps, but can be suspended using thicker electrodes. We present the statistical experimental results for successful suspension, as well as the feasible conditions for MWNT suspension based on a theoretical approach.
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