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Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique

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Abstract:

This study aims to synthesize lead-free ferroelectric material, (Bi1/2Na1/2)TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400–600 °C and 30–90 min. (Bi1/2Na1/2TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35–162 nm. The remnant polarization (2Pr) and the dielectric constant were 4.6–16.8 μC/cm2, 325–350, respectively.

Keywords: CRYSTALLINE ORIENTATION; ELECTRICAL PROPERTY; LEAD-FREE FERROELECTRIC MATERIALS; LIQUID SPRAYED MISTED CHEMICAL VAPOR DEPOSITION METHOD

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2006.038

Publication date: November 1, 2006

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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