Microstructural Evolution of ZnO by Wet-Etching Using Acidic Solutions

Authors: Lee, Ji-Myon; Kim, Kyoung-Kook; Hyun, Chan-Kyung; Tampo, Hitoshi; Niki, Shigeru

Source: Journal of Nanoscience and Nanotechnology, Volume 6, Number 11, November 2006 , pp. 3364-3368(5)

Publisher: American Scientific Publishers

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Abstract:

The characteristics of the wet-etching of ZnO thin films were investigated using hydrochloric and phosphoric acid solutions as etchants. The etch rate of ZnO films, using a highly diluted hydrochloric acid solutions at a concentration of 0.25% in deionized water, was determined to be about 120 nm/min, and linearly increased with increasing the acid concentration. The surface of ZnO(0001) etched by an HCl solution, observed by scanning electron microscopy, showed a rough morphology with a high density of hexagonal pyramids or cones with sidewall angles of about ∼45°. Moreover, the sidewall angles of the masked area were similar to those of the pyramids on the surface. In comparison, the surface of ZnO(0001) etched by a phosphoric acid had a smooth surface morphology. The origin of this difference is from the very initial stage of etching, indicating that the etch-mechanism is different for each solution. Furthermore, when H₃PO₄ was added to the HCl aqueous solution, the morphology of the etched surface was greatly enhanced and the sidewall angle was also increased to about 65°.

Keywords: ETCH; MICROSTRUCTURE; SURFACE ROUGHNESS; HEXAGONAL PYRAMID; ZNO

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jnn.2006.011

Publication date: 2006-11-01

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Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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Microstructural Evolution of ZnO by Wet-Etching Using Acidic Solutions

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