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Patterning of ZrO2 Precursor Through a Gas-Generated Self-Assembly Route

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We designed a gas-generated self-assembly route for patterning of ZrO2 precursor films from an aqueous peroxozirconium solution. Molecular oxygen generated during the decomposition of zirconium complex selectively aggregated on the hydrophobic surface of self-assembled monolayers, which was photo-modified to be a template. This gas layer prevented the solution from attaching to the substrate, so as the deposition of zirconia precursor occurred almost entirely on the hydrophilic sites. In comparison, only isolated islands of deposits were observed on hydrophobic sites, which may be attributed to contamination or adsorption of colloids during the preparation of samples. The resolution of pattern was well improved by using such a gas-generated process. In addition, this approach can be also extended to prepare other micropatterns.
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Document Type: Short Communication

Publication date: 2006-06-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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