Patterning of ZrO2 Precursor Through a Gas-Generated Self-Assembly Route
Abstract:We designed a gas-generated self-assembly route for patterning of ZrO2 precursor films from an aqueous peroxozirconium solution. Molecular oxygen generated during the decomposition of zirconium complex selectively aggregated on the hydrophobic surface of self-assembled monolayers, which was photo-modified to be a template. This gas layer prevented the solution from attaching to the substrate, so as the deposition of zirconia precursor occurred almost entirely on the hydrophilic sites. In comparison, only isolated islands of deposits were observed on hydrophobic sites, which may be attributed to contamination or adsorption of colloids during the preparation of samples. The resolution of pattern was well improved by using such a gas-generated process. In addition, this approach can be also extended to prepare other micropatterns.
Document Type: Short Communication
Publication date: June 1, 2006
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