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Surface Modification by Electric Discharge Implemented with Electrodes Composed of Carbon Nanotubes

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In this work the electric discharge machining (EDM) implementing with multi-wall carbon nanotubes (MWCNT) as a miniscule electrode for pursuing precise surface modification was studied. The excellent upright growth of carbon nanotubes on copper based alloy substrates by a radio frequency (RF) assisted hot filament chemical vapor deposition (HFCVD) method suggests us to exploit MWCNTs as the miniature electrodes for discharge machining. The results reveal that the electrodes are much endurable to be distorted even when the spoiling rates for the polishing of n-type Si wafer (of 10 ∼ 100 Ω-cm) are up to 30 nm/min with. It is expected that MWCNTs can be applied to non-conventional material processing especially in miniature discharge machining.
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Document Type: Research Article

Publication date: 2006-05-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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