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Silicon Nanowire Synthesis by a Vapor–Liquid–Solid Approach

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Abstract:

Synthesis of silicon nanowires is studied by using a vapor–liquid–solid growth technique. Silicon tetrachloride reduction with hydrogen in the gas phase is used with gold serving as catalyst to facilitate growth. Only a narrow set of conditions of SiCl4 concentration and temperature yield straight nanowires. High concentrations and temperatures generally result in particulates, catalyst coverage and deactivation, and coatinglike materials.

Keywords: CATALYZED GROWTH; NANOWIRE SYNTHESIS; SILICON NANOWIRES; VERTICAL NANOWIRES; VERTICAL TRANSISTORS; VLS APPROACH

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2005.107

Publication date: 2005-05-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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