@article {Johnson:2002:1533-4880:325, title = "Performance of AlGaN/GaN High Electron Mobility Transistors at Nanoscale Gate Lengths", journal = "Journal of Nanoscience and Nanotechnology", parent_itemid = "infobike://asp/jnn", publishercode ="asp", year = "2002", volume = "2", number = "3-4", publication date ="2002-07-01T00:00:00", pages = "325-332", itemtype = "ARTICLE", issn = "1533-4880", eissn = "1533-4899", url = "https://www.ingentaconnect.com/content/asp/jnn/2002/00000002/f0020003/art00009", doi = "doi:10.1166/jnn.2002.092", keyword = "", author = "Johnson, J. W. and Ren, F. and Pearton, S. J. and Baca, A. G. and Han, J. and Dabiran, A. M. and Chow, P. P.", abstract = "The DC and RF performance of AlGaN/GaN high electron mobility transistors with nanoscale gate lengths is presented. The layer structures were grown by either metal organic chemical vapor deposition or rf plasma-assisted molecular beam epitaxy. Excellent scaling properties were observed as a function of both gate length and width and confirm that these devices are well suited to both high speed switching and power microwave applications. ", }